激光多焦点阵列以兼具更高的光场操控自由度和焦斑单元高空间分辨率的特点，被广泛应用在光学诱捕以及飞秒激光微纳制造等领域。然而由于阵列中焦斑的纵向分辨率弱于横向分辨率，在激光加工应用中限制了其对各向同性结构的加工能力。因此，本文提出一种基于柱矢量光调控生成纵向超分辨准球形多焦点阵列的方法。利用对柱矢量光的两组基径向偏振光和角向偏振光分别进行聚焦调控，结合环形衰减调制可形成纵向超分辨焦斑，再将两种偏振光场以适当的振幅比例在焦区叠加，从而合成准球形多焦点阵列。实验结果表明，10×10的多焦点阵列中各焦斑尺寸均一，具有近球形光强分布。其中，阵列中所有焦点的纵向半高全宽的平均值为0.76λ、标准差为0.005λ，横向半高全宽的平均值为0.76λ、标准差为0.019λ。该具有高尺寸均一性的准球形多焦点阵列可为激光微纳加工精准制备微纳器件提供新的途径。

Achieving an axial superresolved focus with a single lens by simply inserting a modulation mask in the pupil plane is preferred due to its compact configuration and general applicability. However, lack of a universal theoretical model to manifest the superresolved focusing mechanism vastly complicates the mask design and hinders optimal resolution. Here we establish an interference model and find out that the axial resolution closely relates to the Gouy phase gradient (GPG) at the focal point. Using a GPG tuning-based optimization approach, the axial resolution of a ring-mask-modulated beam is readily improved to attain superresolved focal depth for multiple types of pupil function and polarization. In experiment, a focus with an axial resolution of 27% improved from the diffraction limit and 11% finer than the previously reported record is demonstrated for the radially polarized beam. In simulations, a spherical focus with 3D isotropic resolution and a superoscillation-like axial modulation behavior toward extremely high axial resolution is also presented. This approach can be applied for varied types of pupil function, wavelength, and polarization, and can be easily transferred to other traditional or superresolution microscopes to upgrade their axial resolution.